Optical waveguide components with high refractive index difference in silicon-oxynitride for application in integrated optoelectronics

Bernd Schauwecker; Michael Arnold; Christian V. Radehaus; Georges Przyrembel; Berndt Kuhlow

doi:10.1117/1.1419188

1 January 2002 Optical waveguide components with high refractive index difference in silicon-oxynitride for application in integrated optoelectronics

Bernd Schauwecker, Michael Arnold, Christian V. Radehaus, Georges Przyrembel, Berndt Kuhlow

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Optical Engineering, Vol. 41, Issue 1, (January 2002). https://doi.org/10.1117/1.1419188

Planar optical waveguide structures in communication network applications require a number of indispensable features, e.g., low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, and high integration density, as well as reliable and cost- efficient fabrication. The presented concept of integrated optical waveguide structures is based on the high refractive index material system of silicon-oxynitride on silicon. This system has the potential to meet all mentioned requirements. We describe the design and fabrication of such waveguide structures and demonstrate basic integrated optical components with good performance.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Bernd Schauwecker, Michael Arnold, Christian V. Radehaus, Georges Przyrembel, and Berndt Kuhlow "Optical waveguide components with high refractive index difference in silicon-oxynitride for application in integrated optoelectronics," Optical Engineering 41(1), (1 January 2002). https://doi.org/10.1117/1.1419188

Published: 1 January 2002

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