Nonscanning three-dimensional measurement by structured illumination sectioning microscopy

Tong Wang; Tao Liu; Shuming Yang; Qiang Liu; Yiming Wang

doi:10.1117/1.OE.57.7.074104

14 July 2018 Nonscanning three-dimensional measurement by structured illumination sectioning microscopy

Tong Wang, Tao Liu, Shuming Yang, Qiang Liu, Yiming Wang

Author Affiliations +

Optical Engineering, Vol. 57, Issue 7, 074104 (July 2018). https://doi.org/10.1117/1.OE.57.7.074104

Abstract

To achieve nonscanning three-dimensional measurement of microstructures, the optically sectioning mechanism has been used based on the structured illumination microscopy. The key point is to implement nonscanning measurement within a limited axial range according to the measured one-sided linear response curve. One-dimensional transmission grating pattern was projected onto the sample, and optically sectioned images were extracted from three-step phase-shifting manipulation. Compared with the basic and differential confocal microscopy, the described method does not need time-consuming axial scanning, so it greatly improves the measurement efficiency. The results show that the described method is useful in the fields of micromechanics, microelectronics, and biomedicine.

Citation Download Citation

Tong Wang, Tao Liu, Shuming Yang, Qiang Liu, and Yiming Wang "Nonscanning three-dimensional measurement by structured illumination sectioning microscopy," Optical Engineering 57(7), 074104 (14 July 2018). https://doi.org/10.1117/1.OE.57.7.074104

Received: 23 April 2018; Accepted: 20 June 2018; Published: 14 July 2018

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