23 June 2022 Polarization-maintaining retroreflector for reducing the periodic nonlinearity caused by the corner cube in heterodyne interferometers
Mengting Liu, Xiaohao Dong, Jie Wang
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Abstract

Optics imperfection is one of the fundamental errors that produce periodic nonlinearities which limits displacement measurement accuracy with heterodyne interferometers. A corner cube-based retroreflector is commonly used to increase measuring resolution, but it causes changes to incident polarization that introducing the two-frequency mixing. A mathematical model of periodic nonlinearities is established, taking into account of those facts for a double-pass interferometer, for analyzing and design. To minimize the periodic nonlinearity caused by the corner cube, we propose a polarization-maintaining retroreflector (PMR) instead of a common one. The theoretical analysis shows that the PMR can reduce the periodic nonlinearity caused by the corner cube in heterodyne interferometers significantly. Furthermore, polarization leakage coefficients and total periodic nonlinearities measurements are carried out to verify the performances of the PMR. Experimental results indicate that the periodic nonlinearity decreases from 8 to 2 nm after the normal corner cube is replaced by the PMR, and their periods of the phase shifts are consistent with the theoretical analysis.

© 2022 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2022/$28.00 © 2022 SPIE
Mengting Liu, Xiaohao Dong, and Jie Wang "Polarization-maintaining retroreflector for reducing the periodic nonlinearity caused by the corner cube in heterodyne interferometers," Optical Engineering 61(6), 064110 (23 June 2022). https://doi.org/10.1117/1.OE.61.6.064110
Received: 22 February 2022; Accepted: 11 May 2022; Published: 23 June 2022
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KEYWORDS
Interferometers

Polarization

Heterodyning

Retroreflectors

Optical engineering

Laser sources

Error analysis

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