21 April 2023 Defect inspection of optical components based on dark-field polarization imaging and convolutional neural network recognition algorithms
Canhua Xu, Daifu Zheng, Yantang Huang, Zhiping Zeng
Author Affiliations +
Abstract

Automatic optical inspection technology (AOI) is a visual inspection technology that has developed rapidly in recent years. The high speed and accuracy of AOI can greatly enhance the efficiency of modern industrial production. However, when this technology is applied to optical components inspection, it encounters a challenge that the specular highlight induces over or under exposure during the imaging process, and further results in a low imaging contrast and unclear defect details of the targets. To solve this problem, a dark-field polarization imaging setup based on a division-of-focal-plane polarization camera was adopted to achieve high contrast defect images. Meanwhile, algorithms based on the improved LeNet-5 convolutional neural network were developed to recognize the defects. An accuracy above 99.5% was obtained for the distinction of defective and non-defective samples, and an accuracy of 94.4% was reached for the various defect classification. Our work demonstrated an effective application of polarization imaging and machine learning in AOI of optical components manufacturing.

© 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)
Canhua Xu, Daifu Zheng, Yantang Huang, and Zhiping Zeng "Defect inspection of optical components based on dark-field polarization imaging and convolutional neural network recognition algorithms," Optical Engineering 62(4), 043101 (21 April 2023). https://doi.org/10.1117/1.OE.62.4.043101
Received: 1 November 2022; Accepted: 5 April 2023; Published: 21 April 2023
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Cited by 1 scholarly publication.
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KEYWORDS
Optical components

Polarization imaging

Polarization

Education and training

Detection and tracking algorithms

Convolution

Defect inspection

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