Dr. Søren Alkærsig Jensen Profile

Dr. Søren Alkærsig Jensen

at Danish Fundamental Metrology

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Publications (2)

Proceedings Article | 2 March 2020 Paper

Optical metrology for nanowires grown with molecular beam epitaxy

Jonas Skovlund Møller Madsen, Søren Alkærsig Jensen, Thomas Kanne, Jesper Nygård, Poul Erik Hansen

Proceedings Volume 11291, 1129111 (2020) https://doi.org/10.1117/12.2553680

KEYWORDS: Nanowires, Scanning electron microscopy, Scatterometry, Diffraction, Data modeling, Molecular beam epitaxy, Electron beam lithography

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Proceedings Article | 26 June 2017 Paper

Modeling surface imperfections in thin films and nanostructured surfaces

P.-E. Hansen, J. Madsen, S. Jensen, M. Madsen, M. Karamehmedovic

Proceedings Volume 10330, 103300J (2017) https://doi.org/10.1117/12.2270232

KEYWORDS: Modeling, Reflectivity, Silicon, Thin films, Inverse problems, Ellipsometry, Surface roughness, Scattering, Nanostructured thin films, Nanostructuring, Optical metrology, Metrology, Scatterometry

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