AlGaN-based UV-C laser diodes (LDs) are expected to be applied to various applications as a low-cost, environmentally friendly, and highly efficient laser light source. Although it has been difficult to realize DUV LDs due to problems with AlGaN crystals, we have achieved pulsed lasing at room temperature (R.T.) by improving crystal quality and demonstrating hole injection technology based on polarized doping technology. Furthermore, by suppressing process-induced dislocations and improving optical confinement, the threshold gain and drive voltage were improved, and continuous-wave lasing of a UV-C laser at R.T. with a threshold current density of 4.2 kA/cm2 and a threshold voltage of 8.7 V was successfully achieved.
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