Silicon nitride photonics: large scale integration and applications

Quentin Wilmart; Sylvain Guerber; Jonathan Faugier-Tovar; Eleonora Garoni; Laura Sauze; Lavinia Nistor; Ahmed Gharbi; Vincent Mathieu; Tristan Dewolf; Rémi Coquand; Christophe Lecouvey; Guillaume Rodriguez; Linda Gianini; Baptiste Routier; Leopold Virot

doi:10.1117/12.3001555

13 March 2024 Silicon nitride photonics: large scale integration and applications

Quentin Wilmart, Sylvain Guerber, Jonathan Faugier-Tovar, Eleonora Garoni , Laura Sauze, Lavinia Nistor, Ahmed Gharbi, Vincent Mathieu, Tristan Dewolf, Rémi Coquand, Christophe Lecouvey, Guillaume Rodriguez, Linda Gianini, Baptiste Routier, Leopold Virot

Author Affiliations +

Proceedings Volume PC12889, Integrated Optics: Devices, Materials, and Technologies XXVIII; PC128890C (2024) https://doi.org/10.1117/12.3001555
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Silicon nitride (SiN) have become an essential material for integrated photonics. It is needed whenever very low optical losses, high optical power, low thermal sensitivity or broad wavelength range is required. SiN waveguides therefore present a great interest for applications as diverse as quantum photonics, data-communication, neuromorphic computing, LiDAR, sensing and microwave optic. We present our latest results on two distinct platforms: An 8” LPCVD SiN platform featuring ultra-low loss (5dB/m) and a 12” Physical Vapor Deposition (PVD) SiN platform allowing low loss in the C-band with a low-temperature deposition.

Conference Presentation

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Quentin Wilmart, Sylvain Guerber, Jonathan Faugier-Tovar, Eleonora Garoni , Laura Sauze, Lavinia Nistor, Ahmed Gharbi, Vincent Mathieu, Tristan Dewolf, Rémi Coquand, Christophe Lecouvey, Guillaume Rodriguez, Linda Gianini, Baptiste Routier, and Leopold Virot "Silicon nitride photonics: large scale integration and applications", Proc. SPIE PC12889, Integrated Optics: Devices, Materials, and Technologies XXVIII, PC128890C (13 March 2024); https://doi.org/10.1117/12.3001555

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