Engineering silicon detectors with high quantum efficiency for low energy electrons

Kevin Lauer; Stephanie Reiss; Andreas Frank; Thomas Klein; Erik Hiller; Thomas Ortlepp; Toni Schildhauer

doi:10.1117/12.2692482

13 March 2024 Engineering silicon detectors with high quantum efficiency for low energy electrons

Kevin Lauer, Stephanie Reiss, Andreas Frank, Thomas Klein, Erik Hiller, Thomas Ortlepp, Toni Schildhauer

Proceedings Volume PC12912, Quantum Sensing, Imaging, and Precision Metrology II; PC129122O (2024) https://doi.org/10.1117/12.2692482
Event: SPIE Quantum West, 2024, San Francisco, California, United States

Abstract

Numerous precision metrology systems for detecting quanta of any kind are based on silicon detectors. One example are silicon detectors used in scanning electron microscopes (SEM) for electron detection. The need to investigate objects at the very near surface like e.g. cells in biology pushes the scientific progress for these silicon detectors. To study surface near regions of e.g. biological objects electrons with low energies around 500eV are necessary. Unfortunately, the quantum efficiency for such low energy electrons of state-of-the-art electron detectors is low or even non-existent. In this contribution the development of silicon electron detectors with large quantum efficiencies of more than 55% for electrons with an energy of 500eV is presented. The crucial steps in the development like the thin entrance window and a very shallow junction will be discussed and analyzed by simulation and experiments like secondary ion mass spectrometry (SIMS) measurements at CiS.

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Citation Download Citation

Kevin Lauer, Stephanie Reiss, Andreas Frank, Thomas Klein, Erik Hiller, Thomas Ortlepp, and Toni Schildhauer "Engineering silicon detectors with high quantum efficiency for low energy electrons", Proc. SPIE PC12912, Quantum Sensing, Imaging, and Precision Metrology II, PC129122O (13 March 2024); https://doi.org/10.1117/12.2692482

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KEYWORDS

Electrons

Silicon

Quantum efficiency

Windows

Engineering

Quantum processes

Quantum simulation

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