Simulation of the evolution of fused silica’s surface defect during wet chemical etching

Taixiang Liu; Ke Yang; Heyang Li; Lianghong Yan; Xiaodong Yuan; Hongwei Yan

doi:10.1117/12.2269510

1 August 2017 Simulation of the evolution of fused silica’s surface defect during wet chemical etching

Taixiang Liu, Ke Yang, Heyang Li, Lianghong Yan, Xiaodong Yuan, Hongwei Yan

Proceedings Volume 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers; 103390C (2017) https://doi.org/10.1117/12.2269510
Event: Pacific Rim Laser Damage 2017: Optical Materials for High Power Lasers, 2017, Shanghai, China

Abstract

Large high-power-laser facility is the basis for achieving inertial confinement fusion, one of whose missions is to make fusion energy usable in the near future. In the facility, fused silica optics plays an irreplaceable role to conduct extremely high-intensity laser to fusion capsule. But the surface defect of fused silica is a major obstacle limiting the output power of the large laser facility and likely resulting in the failure of ignition. To mitigate, or event to remove the surface defect, wet chemical etching has been developed as a practical way. However, how the surface defect evolves during wet chemical etching is still not clearly known so far. To address this problem, in this work, the three-dimensional model of surface defect is built and finite difference time domain (FDTD) method is developed to simulate the evolution of surface defect during etching. From the simulation, it is found that the surface defect will get smooth and result in the improvement of surface quality of fused silica after etching. Comparatively, surface defects (e.g. micro-crack, scratch, series of pinholes, etc.) of a typical fused silica at different etching time are experimentally measured. It can be seen that the simulation result agrees well with the result of experiment, indicating the FDTD method is valid for investigating the evolution of surface defect during etching. With the finding of FDTD simulation, one can optimize the treatment process of fused silica in practical etching or even to make the initial characterization of surface defect traceable.

Citation Download Citation

Taixiang Liu, Ke Yang, Heyang Li, Lianghong Yan, Xiaodong Yuan, and Hongwei Yan "Simulation of the evolution of fused silica’s surface defect during wet chemical etching", Proc. SPIE 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers, 103390C (1 August 2017); https://doi.org/10.1117/12.2269510

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KEYWORDS

Silica

Etching

Finite-difference time-domain method

Wet etching

3D modeling

Fusion energy

Laser welding

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