Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching

Kaiki Ito; Yuta Suzuki; Toshiyuki Horiuchi

doi:10.1117/12.2277818

13 July 2017 Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching

Kaiki Ito, Yuta Suzuki, Toshiyuki Horiuchi

Author Affiliations +

Proceedings Volume 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology; 1045410 (2017) https://doi.org/10.1117/12.2277818
Event: Photomask Japan 2017, 2017, Yokohama, Japan

Abstract

Lithographical patterning on the surface of a fine pipe with a thin wall is required for fabricating three-dimensional micro-parts. For this reason, a new exposure system for printing patterns on a cylindrical pipe by synchronous rotary scan-projection exposure was developed. Using the exposure system, stent-like resist patterns with a width of 251 μm were printed on a surface of stainless-steel pipe with an outer diameter of 2 mm. The exposure time was 30 s. Next, the patterned pipe was chemically etched. As a result, a stent-like mesh pipe with a line width of 230 μm was fabricated. It was demonstrated that the new method had a potential to be applied to fabrications of stent and other cylindrical micro-parts.

Citation Download Citation

Kaiki Ito, Yuta Suzuki, and Toshiyuki Horiuchi "Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching", Proc. SPIE 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology, 1045410 (13 July 2017); https://doi.org/10.1117/12.2277818

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