Methods and challenges in laser-induced damage threshold evaluation of volumetric photopolymerized micro-structures

Laurynas Čekanavičius; Linas Jonušauskas; Agnė Butkutė; Mangirdas Malinauskas

doi:10.1117/12.2307595

24 May 2018 Methods and challenges in laser-induced damage threshold evaluation of volumetric photopolymerized micro-structures

Laurynas Čekanavičius, Linas Jonušauskas, Agnė Butkutė, Mangirdas Malinauskas

Author Affiliations +

Proceedings Volume 10677, Unconventional Optical Imaging; 106772K (2018) https://doi.org/10.1117/12.2307595
Event: SPIE Photonics Europe, 2018, Strasbourg, France

Abstract

The spread of micro-optical elements fabrication by femtosecond 3D nanolithography is limited due to lack of available optically resilient photopolymers. We have conducted S-on-1 laser-induced damage threshold (LIDT) measurement experiment with two different photopolymers, which demonstrated varying damage probability distribution after which suitable linear approximation technique was not evident. Moreover, different optical damage mechanisms were present during laser irradiation of diverse photopolymers that featured different chemical composition and physical properties. Seeking to determine reliable LIDT evaluation method which would provide trustworthy results for all the investigated materials, we have used three different ISO standard-like approaches. Results comparison for two different cases was conducted concluding that linear approximation of input fluencies range where optical damage probability is 0%<P <100% provides the lowest LIDT value for discussed examples, at the same time showing consistent and suitable for practical applications results.

Citation Download Citation

Laurynas Čekanavičius, Linas Jonušauskas, Agnė Butkutė, and Mangirdas Malinauskas "Methods and challenges in laser-induced damage threshold evaluation of volumetric photopolymerized micro-structures", Proc. SPIE 10677, Unconventional Optical Imaging, 106772K (24 May 2018); https://doi.org/10.1117/12.2307595

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KEYWORDS

Optical damage

Photopolymers

Inspection

Scanning electron microscopy

Standards development

Femtosecond phenomena

Laser damage threshold

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