Research on micro-cantilever calibration method based on nano indentation technology

Shaofei Wang

doi:10.1117/12.2624767

27 March 2022 Research on micro-cantilever calibration method based on nano indentation technology

Shaofei Wang

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 121696K (2022) https://doi.org/10.1117/12.2624767
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

With the deepening of the related research work of atomic force microscope (AFM), people can not only be satisfied with the morphology measurement function of AFM. [1,2] How to use AFM to carry out micro force measurement has gradually become one of the hotspots of AFM application research. Among them, the elastic coefficient of AFM micro cantilever is an important bridge connecting the AFM input signal and the force on the needle tip. [3] Therefore, the measurement of elastic coefficient of micro cantilever is an important premise for micro force measurement using AFM. According to the characteristics of rectangular micro cantilever and the practical problems faced in AFM measurement, the measurement technology of elastic coefficient of AFM micro cantilever based on nano indentation measurement technology is studied in this paper. The theoretical analysis and experimental results show that the nano indentation method can be used to calibrate the elastic coefficient of micro cantilever.

Citation Download Citation

Shaofei Wang "Research on micro-cantilever calibration method based on nano indentation technology", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 121696K (27 March 2022); https://doi.org/10.1117/12.2624767

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