Research on pitch analysis methods for calibration of one-dimensional grating standard based on nanometrological AFM

Qiangxian Huang; Satoshi Gonda; Ichiko Misumi; Taeho Keem; Tomizo Kurosawa

doi:10.1117/12.715251

13 October 2006 Research on pitch analysis methods for calibration of one-dimensional grating standard based on nanometrological AFM

Qiangxian Huang, Satoshi Gonda, Ichiko Misumi, Taeho Keem, Tomizo Kurosawa

Author Affiliations +

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 628007 (2006) https://doi.org/10.1117/12.715251
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

By present, the calibration of dimensions in nano scale is being paid more and more attentions. One-dimensional grating standard with pitches in nano-scale is being proposed by the CCL-WGDM 7 to be one of the five key comparison parameters in the emerging field of nanometrology. In the pitch calibration of grating standard, Gravity Center Method and Zero-Cross Points Method are proposed. The two methods are analyzed and simulated under different conditions. Based on the actual measurement data obtained by AFM, the two methods are used and the best value is determined. The results in the paper are useful to pitch calibration in nano scale.

Citation Download Citation

Qiangxian Huang, Satoshi Gonda, Ichiko Misumi, Taeho Keem, and Tomizo Kurosawa "Research on pitch analysis methods for calibration of one-dimensional grating standard based on nanometrological AFM", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628007 (13 October 2006); https://doi.org/10.1117/12.715251

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available