Amorphous germanium waveguides for medical diagnostics using mid-infrared spectroscopy

Eleanor Osborne; Aneesh Vincent Veluthandath; Waseem Ahmed; Sirawit Boonsit; Vasileios Mourgelas; James S. Wilkinson; Ganapathy Senthil Murugan

doi:10.1117/12.2648868

17 March 2023 Amorphous germanium waveguides for medical diagnostics using mid-infrared spectroscopy

Eleanor Osborne, Aneesh Vincent Veluthandath, Waseem Ahmed, Sirawit Boonsit, Vasileios Mourgelas, James S. Wilkinson, Ganapathy Senthil Murugan

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Proceedings Volume 12424, Integrated Optics: Devices, Materials, and Technologies XXVII; 1242411 (2023) https://doi.org/10.1117/12.2648868
Event: SPIE OPTO, 2023, San Francisco, California, United States

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Abstract

Molecules have ‘fingerprint’ absorptions in the mid-infrared, enabling their identification via infrared spectroscopy. For applications beyond the lab, such as medical diagnosis, fully integrated mid-infrared spectroscopy on chip would be ideal. Germanium offers low absorption in the mid-IR, making it an ideal candidate for waveguides for mid-IR spectroscopy via the evanescent field. Amorphous germanium could offer a low-cost fabrication route; our work compares methods to deposit amorphous germanium films via RF sputtering, e-beam evaporation and plasma-enhanced chemical vapour deposition (PECVD). In addition to standard germanium waveguides produced by etching a germanium film, an alternative manufacturing method is proposed, where silicon is etched to form pedestals, followed by deposition of amorphous germanium to produce waveguides. Pedestal waveguides offer potential for single-mode operation across a broad wavelength range, making them a strong candidate for spectroscopy applications.

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Eleanor Osborne, Aneesh Vincent Veluthandath, Waseem Ahmed, Sirawit Boonsit, Vasileios Mourgelas, James S. Wilkinson, and Ganapathy Senthil Murugan "Amorphous germanium waveguides for medical diagnostics using mid-infrared spectroscopy", Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 1242411 (17 March 2023); https://doi.org/10.1117/12.2648868

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