Design of a laser cutting system at large distance by a synthetic aperture diffractive optical system in reflection mode

Bernard C. Kress; G. Tahmouch; Patrick Meyrueis

doi:10.1117/12.281093

18 August 1997 Design of a laser cutting system at large distance by a synthetic aperture diffractive optical system in reflection mode

Bernard C. Kress, G. Tahmouch, Patrick Meyrueis

Author Affiliations +

Proceedings Volume 3097, Lasers in Material Processing; (1997) https://doi.org/10.1117/12.281093
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Laser material processing by the mean of Diffractive Optical Elements (DOEs) is a promising field, that has not yet entered the industrial world, except for hybrid on-axis spherical or aspherical lenses fabricated by diamond turning. Laser cutting, engraving, welding, and heat treatment are several applications among the potential of numeric-type beam shaping DOEs, designed and optimized by iterative algorithms and fabricated by microlithographic techniques. However, these DOEs have to be etched within materials which should withstand very high energy distributions (either from YAG, CO₂ or Excimer lasers). Typical physical DOE configurations in transmission mode are etched ZnSe, ZnS, Ge substrates or even Quartz substrates, and in reflection mode, Au or Al coated etched substrates, blank etched Quartz substrates (YAG), or even SiC etched substrates.

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Bernard C. Kress, G. Tahmouch, and Patrick Meyrueis "Design of a laser cutting system at large distance by a synthetic aperture diffractive optical system in reflection mode", Proc. SPIE 3097, Lasers in Material Processing, (18 August 1997); https://doi.org/10.1117/12.281093

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