New 3D surface profile measurement based on phase-shift interfering technology

Bo Liu; Ling Yang; Jianying Fan; Jian Zhang

doi:10.1117/12.304407

1 April 1998 New 3D surface profile measurement based on phase-shift interfering technology

Bo Liu, Ling Yang, Jianying Fan, Jian Zhang

Proceedings Volume 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II; (1998) https://doi.org/10.1117/12.304407
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

This paper describes a kind of profiler with the above features. It uses the white-light interfering method and adopts the structure of Micelson interferometer. It includes the light bulb used as the light resource, CCD used as the sensor, PZT providing microscopic translating and the computer sampling and processing data with high speed. When the reference-mirror translating, computing and comparing the modulation M of each point of the surface will give their relative surface height. Then we obtain the surface profile of object to be measured.

Citation Download Citation

Bo Liu, Ling Yang, Jianying Fan, and Jian Zhang "New 3D surface profile measurement based on phase-shift interfering technology", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304407

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