Recent advances in the Sandia EUV 10x microstepper

John E. M. Goldsmith; Pamela K. Barr; Kurt W. Berger; Luis J. Bernardez II; Gregory Frank Cardinale; Joel R. Darnold; Daniel R. Folk; Steven J. Haney; Craig C. Henderson; Karen J. Jefferson; Kevin D. Krenz; Glenn D. Kubiak; Rodney P. Nissen; Donna J. O'Connell; Yon E. Perras; Avijit K. Ray-Chaudhuri; Tony G. Smith; Richard H. Stulen; Daniel A. Tichenor; Alfred A. Ver Berkmoes; John B. Wronosky

doi:10.1117/12.309570

5 June 1998 Recent advances in the Sandia EUV 10x microstepper

John E. M. Goldsmith, Pamela K. Barr, Kurt W. Berger, Luis J. Bernardez II, Gregory Frank Cardinale, Joel R. Darnold, Daniel R. Folk, Steven J. Haney, Craig C. Henderson, Karen J. Jefferson, Kevin D. Krenz, Glenn D. Kubiak, Rodney P. Nissen, Donna J. O'Connell, Yon E. Perras, Avijit K. Ray-Chaudhuri, Tony G. Smith, Richard H. Stulen, Daniel A. Tichenor, Alfred A. Ver Berkmoes, John B. Wronosky

Author Affiliations +

Proceedings Volume 3331, Emerging Lithographic Technologies II; (1998) https://doi.org/10.1117/12.309570
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

The Sandia EUV 10x microstepper system is the result of an evolutionary development process, starting with a simple 20x system, progressing through an earlier 10x system, to the current system that has full microstepper capabilities. The 10x microstepper prints 400-micrometers -diameter fields at sub- 0.10-micrometers resolution. Upgrades include the replacement of the copper wire target with a pulsed xenon jet target, construction of an improved projection optics system, the addition of a dose monitor a d an aerial image monitor, and the addition of a graphical user interface to the system operation software. This paper provides an up-to-date report on the status of the microstepper.

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John E. M. Goldsmith, Pamela K. Barr, Kurt W. Berger, Luis J. Bernardez II, Gregory Frank Cardinale, Joel R. Darnold, Daniel R. Folk, Steven J. Haney, Craig C. Henderson, Karen J. Jefferson, Kevin D. Krenz, Glenn D. Kubiak, Rodney P. Nissen, Donna J. O'Connell, Yon E. Perras, Avijit K. Ray-Chaudhuri, Tony G. Smith, Richard H. Stulen, Daniel A. Tichenor, Alfred A. Ver Berkmoes, and John B. Wronosky "Recent advances in the Sandia EUV 10x microstepper", Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); https://doi.org/10.1117/12.309570

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