Development of characterization tools for reliability testing of micro-electro-mechanical system actuators

Norman F. Smith; William P. Eaton; Danelle M. Tanner; James J. Allen

doi:10.1117/12.359365

18 August 1999 Development of characterization tools for reliability testing of micro-electro-mechanical system actuators

Norman F. Smith, William P. Eaton, Danelle M. Tanner, James J. Allen

Author Affiliations +

Proceedings Volume 3880, MEMS Reliability for Critical and Space Applications; (1999) https://doi.org/10.1117/12.359365
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include: (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive actuator.

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Norman F. Smith, William P. Eaton, Danelle M. Tanner, and James J. Allen "Development of characterization tools for reliability testing of micro-electro-mechanical system actuators", Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); https://doi.org/10.1117/12.359365

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