Dr. Danelle M. Tanner Profile

Dr. Danelle M. Tanner

Project Leader at Sandia National Labs

SPIE Involvement:

Author

Proceedings Article | 5 February 2010 Paper

Stability experiments on MEMS aluminum nitride RF resonators

Danelle Tanner, Roy Olsson, Ted Parson, Shannon Crouch, Jeremy Walraven, James Ohlhausen

Proceedings Volume 7592, 759209 (2010) https://doi.org/10.1117/12.846551

KEYWORDS: Resonators, Semiconducting wafers, Aluminum nitride, Silicon, Microelectromechanical systems, Electrodes, Contamination, Aluminum, Network security, Sensors

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Proceedings Article | 14 February 2008 Paper

Challenges of designing and processing extreme low-G microelectromechanical system (MEMS) accelerometers

Thomas Swiler, Uma Krishnamoorthy, Peggy Clews, Michael Baker, Danelle Tanner

Proceedings Volume 6884, 68840O (2008) https://doi.org/10.1117/12.778244

KEYWORDS: Semiconducting wafers, Packaging, Sensors, Microelectromechanical systems, Silicon, Silica, Epoxies, Switches, Chemical elements, Deep reactive ion etching

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Proceedings Article | 6 January 2006 Paper

Experimental apparatus and software design for dynamic long-term reliability testing of a spring-mass MEMS device

Phillip Reu, Danelle Tanner, David Epp, Ted Parson, Brad Boyce

Proceedings Volume 6111, 61110J (2006) https://doi.org/10.1117/12.648488

KEYWORDS: Laser Doppler velocimetry, Microelectromechanical systems, Humidity, Reliability, Control systems, Microscopes, Mirrors, Imaging systems, Interference (communication), Silicon

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Proceedings Article | 16 January 2003 Paper

Vapor deposition of amino-functionalized self-assembled monolayers on MEMS

Matthew Hankins, Paul Resnick, Peggy Clews, Thomas Mayer, David Wheeler, Danelle Tanner, Richard Plass

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478206

KEYWORDS: Coating, Microelectromechanical systems, Silicon, Humidity, Nitrogen, Self-assembled monolayers, Liquids, Semiconducting wafers, Molecules, Oxides

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Proceedings Article | 16 January 2003 Paper

Resonant frequency method for monitoring MEMS fabrication

Danelle Tanner, Albert Owen, Fredd Rodriguez

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478201

KEYWORDS: Resonators, Semiconducting wafers, Scanning electron microscopy, Microelectromechanical systems, Etching, Resistors, Optical lithography, Resistance, Electron microscopes, Plasma etching

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Proceedings Article | 16 January 2003 Paper

Anodic oxidation-induced delamination of the SUMMiT poly 0 to silicon nitride interface

Richard Plass, Jeremy Walraven, Danelle Tanner, Frederick Sexton

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.476366

KEYWORDS: Electrodes, Silicon, Interfaces, Oxides, Microelectromechanical systems, Humidity, Scanning electron microscopy, Photomicroscopy, Oxygen, Oxidation

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Proceedings Article | 16 January 2003 Paper

Wear mechanisms in a reliability methodology

Danelle Tanner, Michael Dugger

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.476345

KEYWORDS: Particles, Silicon, Reliability, Humidity, Oxides, Failure analysis, Tungsten, Microelectromechanical systems, Data modeling, Actuators

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Proceedings Article | 2 October 2001 Paper

Parametric monitoring for the SUMMiT V surface-micromachining process

Andrew Oliver, Danelle Tanner, Seethambal Mani, Scott Swanson, Karen Helgesen, Norman Smith

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443008

KEYWORDS: Resistance, Resonators, Actuators, Surface micromachining, Diagnostics, Scanning electron microscopy, Photography, Teeth, Oxides, Microelectromechanical systems

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Proceedings Article | 10 August 2000 Paper

Failure analysis of tungsten-coated polysilicon micromachined microengines

Jeremy Walraven, Seethambal Mani, James Fleming, Thomas Headley, Paul Kotula, Alejandro Pimentel, Michael Rye, Danelle Tanner, Norman Smith

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395708

KEYWORDS: Tungsten, Microelectromechanical systems, Scanning electron microscopy, Transmission electron microscopy, Failure analysis, Electrical breakdown, Silicon, Humidity, Atomic force microscopy, Surface roughness

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Proceedings Article | 10 August 2000 Paper

Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode

Jeremy Walraven, Jerry Soden, Danelle Tanner, Paiboon Tangyunyong, Edward Cole, Richard Anderson, Lloyd Irwin

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395703

KEYWORDS: Microelectromechanical systems, Actuators, Electrical breakdown, Scanning electron microscopy, Failure analysis, Amplifiers, Instrument modeling, Atomic force microscopy, Manufacturing, Thermal modeling

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Proceedings Article | 18 August 1999 Paper

Development of characterization tools for reliability testing of micro-electro-mechanical system actuators

Norman Smith, William Eaton, Danelle Tanner, James Allen

Proceedings Volume 3880, (1999) https://doi.org/10.1117/12.359365

KEYWORDS: Actuators, Microelectromechanical systems, Reliability, Image analysis, Sensors, Control systems, Humidity, Inspection, Microscopes, Optical inspection

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Proceedings Article | 18 August 1999 Paper

Failure analysis of worn surface-micromachined microengines

Jeremy Walraven, Thomas Headley, Ann Campbell, Danelle Tanner

Proceedings Volume 3880, (1999) https://doi.org/10.1117/12.359369

KEYWORDS: Humidity, Microelectromechanical systems, Failure analysis, Scanning electron microscopy, Transmission electron microscopy, Silicon, Diffraction, Nitrogen, Chemical analysis, Spectroscopy

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Proceedings Article | 8 September 1998 Paper

Characterization techniques for surface-micromachined devices

William Eaton, Norman Smith, Lloyd Irwin, Danelle Tanner

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323884

KEYWORDS: Amplifiers, Visualization, Optical inspection, Inspection, Thin films, Resistance, Modulation, Electronic filtering, Bandpass filters, Phase shifts

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Proceedings Article | 8 September 1998 Paper

Characterization techniques for surface-micromachined devices

William Eaton, Norman Smith, Lloyd Irwin, Danelle Tanner

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323919

KEYWORDS: Amplifiers, Visualization, Optical inspection, Resistance, Inspection, Thin films, Modulation, Bandpass filters, Phase shifts, Data processing

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Proceedings Article | 1 September 1998 Paper

Linkage design effect on the reliability of surface-micromachined microengines driving a load

Danelle Tanner, Kenneth Peterson, Lloyd Irwin, Paiboon Tangyunyong, William Miller, William Eaton, Norman Smith, M. Steven Rodgers

Proceedings Volume 3512, (1998) https://doi.org/10.1117/12.324060

KEYWORDS: Adhesives, Reliability, Failure analysis, Abrasives, Data modeling, Actuators, Surface finishing, Scanning electron microscopy, Inspection, Receivers

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