Laser Doppler method for mode identification on micro-oscillators

Joseph F. Vignola; Scot F. Morse; Xiao Liu; Lidija Sekaric; Brian H. Houston; Douglas M. Photiadis

doi:10.1117/12.386724

22 May 2000 Laser Doppler method for mode identification on micro-oscillators

Joseph F. Vignola, Scot F. Morse, Xiao Liu, Lidija Sekaric, Brian H. Houston, Douglas M. Photiadis

Proceedings Volume 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2000) https://doi.org/10.1117/12.386724
Event: 4th International Conference on Vibration Measurement by Laser Techniques, 2000, Ancona, Italy

Abstract

The mechanical motion of a new class of micro-mechanical devices, known as micro electro-mechanical systems oscillators, is examined using the laser Doppler technique. Currently, experimental methods based on capacitance, induction, and Fabry-Perot interferometry are used to find resonance frequencies and to establish quality factors or Q's. The technique described in this paper is capable of distinguishing mode shapes, yielding calibrated displacements, and revealing the existence of flexural modes, in addition to finding resonance frequencies and establishing Q's as the other techniques do. Because full- field laser vibrometry measurements provide an understanding of the modal composition of the systems, it can be used to refine the design and construction of these devices.

Citation Download Citation

Joseph F. Vignola, Scot F. Morse, Xiao Liu, Lidija Sekaric, Brian H. Houston, and Douglas M. Photiadis "Laser Doppler method for mode identification on micro-oscillators", Proc. SPIE 4072, Fourth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2000); https://doi.org/10.1117/12.386724

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