Direct micro-transfer molding of perfluorocyclobutyl (PFCB) polymer waveguides

Shengrong Chen; Jaime Cardenes; Gregory P. Nordin; Chris M. Topping; Jack J. Jin; Jennifer Thomson; John M. Ballato; Stephen H. Foulger; Dennis W. Smith Jr.

doi:10.1117/12.453928

25 November 2002 Direct micro-transfer molding of perfluorocyclobutyl (PFCB) polymer waveguides

Shengrong Chen, Jaime Cardenes, Gregory P. Nordin, Chris M. Topping, Jack J. Jin, Jennifer Thomson, John M. Ballato, Stephen H. Foulger, Dennis W. Smith Jr.

Author Affiliations +

Proceedings Volume 4805, Design and Fabrication of Planar Optical Waveguide Devices and Materials; (2002) https://doi.org/10.1117/12.453928
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Perfluorocyclobutyl (PFCB) polymers and copolymers enjoy a unique combination of properties well suited for optical applications such as high temperature stability, precisely controlled refractive index, low moisture absorption, excellent melt and solution processability, a variable thermoptic coefficient, and low transmission loss at 1300 and 1550 nm. Copolymerization reactions offer tailored thermal and optical properties by simple choice of comonomer. PFCB copolymers can be solution or melt microfabricated via standard methods and can also be processed via micro-transfer molding in photolithographically generated features. Reliable molding of polymer waveguides offers significant potential to reduce photonic integrated circuit (PIC) fabrication costs and enable the realization of compact, integrated subsystems for a variety of applications. Copolymerization chemistry, thermoptic measurements, and initial results on the first micro-transfer molded waveguide structures are presented.

Citation Download Citation

Shengrong Chen, Jaime Cardenes, Gregory P. Nordin, Chris M. Topping, Jack J. Jin, Jennifer Thomson, John M. Ballato, Stephen H. Foulger, and Dennis W. Smith Jr. "Direct micro-transfer molding of perfluorocyclobutyl (PFCB) polymer waveguides", Proc. SPIE 4805, Design and Fabrication of Planar Optical Waveguide Devices and Materials, (25 November 2002); https://doi.org/10.1117/12.453928

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