Characterization of nanodefects in silicon wafers by white light phase shifting interferometry

Ganesha Udupa; Bryan Kok Ann Ngoi; H. C. Freddy Goh; M. N. Yusoff; A. V. Patil

doi:10.1117/12.526906

19 November 2003 Characterization of nanodefects in silicon wafers by white light phase shifting interferometry

Ganesha Udupa, Bryan Kok Ann Ngoi, H. C. Freddy Goh, M. N. Yusoff, A. V. Patil

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.526906
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

Silicon wafers are widely used in semiconductor and microelectronics industries. With this material, there is an immense need to obtain defect free highly polished surface for improved yield and performance of the micro-components. The Semiconductor Industry Association's (SIA) International Technology Roadmap specifies that by 2005, 30 nm particles must be detectable on bare silicon and non-metallic films, 39 nm particles on metallic films, and 100 nm particles on wafer backsides, for which no solutions currently exist. Both surface and subsurface defects decrease reliability and manufacturing yield of semiconductor devices. Understanding the defect nature, their cause and minimization are equally important to the semiconductor industries. The present work reports on the characterization of these defects by white light phase shifting interferometry.

Citation Download Citation

Ganesha Udupa, Bryan Kok Ann Ngoi, H. C. Freddy Goh, M. N. Yusoff, and A. V. Patil "Characterization of nanodefects in silicon wafers by white light phase shifting interferometry", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.526906

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available