Dr. Ganesha Udupa Profile

Dr. Ganesha Udupa

Research Fellow at Nanyang Technological Univ

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Author

Publications (3)

Proceedings Article | 12 April 2005 Paper

High-speed imaging for evaluation of silicon wafer defects

Jun Wang, Ganesha Udupa, Bryan Ngoi

Proceedings Volume 5852, (2005) https://doi.org/10.1117/12.621673

KEYWORDS: Semiconducting wafers, Silicon, Speckle, Speckle pattern, High speed imaging, Nondestructive evaluation, Inspection, Interferometry, Defect inspection, Crystals

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Proceedings Article | 12 April 2005 Paper

A combined fiber optic digital shearography and holography system for defect inspection in Si-wafers

Ganesha Udupa, Jun Wang, Bryan Ngoi

Proceedings Volume 5852, (2005) https://doi.org/10.1117/12.621526

KEYWORDS: Semiconducting wafers, Shearography, Digital holography, Fiber optics, Holography, Particles, Cameras, Defect detection, Head, Beam splitters

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Proceedings Article | 19 November 2003 Paper

Characterization of nanodefects in silicon wafers by white light phase shifting interferometry

Ganesha Udupa, Bryan Ngoi, H. C. Goh, M. Yusoff, A. Patil

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.526906

KEYWORDS: Semiconducting wafers, Semiconductors, Polishing, Surface finishing, Silicon, Phase interferometry, Particles, Manufacturing, Semiconductor manufacturing, Crystals

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