Paper
26 February 2004 Metrology of focusing gratings and continuous phase plates for LIL and LMJ lasers
Vincent Beau, Denis Valla, Jerome Daurios, Jerome Neauport, Geraud de Villele, Jean Flamand
Author Affiliations +
Abstract
French Megajoules laser (LMJ) and Ligne d'Integration Laser (LIL) are two high power lasers using large diffractive components for focal spot conditioning. Those components are a 420x470 mm2 focusing grating and a 398x383 mm2 continuous phase plate (CPP), both working at wavelength 0.351 μm. In order to control the tight specifications that have to meet those components, CEA and company Jobin-Yvon, in charge of their manufacturing, have developed specific setups. After a brief introduction describing specifications and requirements, we will present the different setups and analysis software used and finally discuss the different measurements that could be done.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vincent Beau, Denis Valla, Jerome Daurios, Jerome Neauport, Geraud de Villele, and Jean Flamand "Metrology of focusing gratings and continuous phase plates for LIL and LMJ lasers", Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); https://doi.org/10.1117/12.512829
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Cited by 4 scholarly publications.
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KEYWORDS
Interferometry

Metrology

Interferometers

Laser metrology

Diffraction gratings

Information operations

Wavefronts

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