Photomask development for 90-nm technology

Yuan Zhang; Rand Cottle; Scott Mackay; Guangming Xiao; James Unruh; Christopher J. Progler

doi:10.1117/12.570482

27 January 2005 Photomask development for 90-nm technology

Yuan Zhang, Rand Cottle, Scott Mackay, Guangming Xiao, James Unruh, Christopher J. Progler

Proceedings Volume 5645, Advanced Microlithography Technologies; (2005) https://doi.org/10.1117/12.570482
Event: Photonics Asia, 2004, Beijing, China

Abstract

To accelerate the time-to-market of advanced photomasks, Photronics launched its 90nm program in spring 2003. The program included three learning cycles and a technology transfer phase. Both 90nm test masks and product masks from leading integrated device manufacturers (IDMs) and foundries were exercised through the cycles. Stringent success criteria were set based on a survey of leading customers’ requirements and the International Technology Roadmap for Semiconductors (ITRS). Hundreds of binary masks, embedded attenuated phase shift masks (EAPSMs), and alternating aperture phase shift masks (AAPSMs) were produced throughout the program. All targets were exceeded. This paper describes program success criteria, complexity of customer requirements, 90nm test vehicle design, and efforts on improving critical dimension (CD) uniformity and registration. Results in positive and negative chemically amplified resist (CAR) and tunable etching for AAPSM are shown. Details on AAPSM undercut optimization, intensity and CD imbalance are reported.

Citation Download Citation

Yuan Zhang, Rand Cottle, Scott Mackay, Guangming Xiao, James Unruh, and Christopher J. Progler "Photomask development for 90-nm technology", Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); https://doi.org/10.1117/12.570482

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available