Back-illuminated solar-blind photodetectors for imaging applications

Ryan McClintock; Alireza Yasan; Kathryn Mayes; Patrick Kung; Manijeh Razeghi

doi:10.1117/12.597077

25 March 2005 Back-illuminated solar-blind photodetectors for imaging applications

Ryan McClintock, Alireza Yasan, Kathryn Mayes, Patrick Kung, Manijeh Razeghi

Proceedings Volume 5732, Quantum Sensing and Nanophotonic Devices II; (2005) https://doi.org/10.1117/12.597077
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

Back-illuminated solar-blind ultraviolet p-i-n photodetectors and focal plane arrays are investigated. We initially study single-pixel devices and then discuss the hybridization to a read-out integrated circuit to form focal plane arrays for solar-blind UV imaging. The photodetectors consist of an AlGaN p-i-n active region grown atop a high quality AlN template layer with a ~1 μm thick Al_0.5Ga_0.5N:Si-In co-doped low-resistance UV-transparent lateral conduction layer. The material is processed into a 320 x 256 array of 25 μm x 25 μm pixels using standard lithographic techniques. Typical pixels demonstrate a peak responsivity of 93 mA/W at 278 nm; this corresponds to an external quantum efficiency of 42%. The uniformity of the array is discussed, and a selection of sample images from the solar-blind focal plane array is included. In addition, recent attempts to achieve shorter wavelength deep UV back-illuminated p-i-n photodetector and focal plane arrays are also discussed.

Citation Download Citation

Ryan McClintock, Alireza Yasan, Kathryn Mayes, Patrick Kung, and Manijeh Razeghi "Back-illuminated solar-blind photodetectors for imaging applications", Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); https://doi.org/10.1117/12.597077

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available