Application of photoresist melting method to the fabrication of holographic grating

Wenhao Li; X. Bayanheshig; Chengshan Zhang; Jianxiang Gao; Hongzhu Yu; Yuguo Tang

doi:10.1117/12.666956

9 December 2005 Application of photoresist melting method to the fabrication of holographic grating

Wenhao Li, X. Bayanheshig, Chengshan Zhang, Jianxiang Gao, Hongzhu Yu, Yuguo Tang

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60242A (2005) https://doi.org/10.1117/12.666956
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

A new technique of reducing surface roughness of photoresist grating is presented. In this paper, photoresist melting method, which is low-cost, short-period and easy realization, is presented. In addition, the influence of photoresist melting on the groove profile of the photoresist grating is investigated. Experimental results show that the surface roughness reduces due to surface tension, when developed photoresist is heated to be melting state by this method. In experiment, when the melted photoresist grating is etched by ion beam, the surface relief grating possessing preferable groove profile is obtained on K9 glass substrate, then the surface is evaporated by aluminum using vacuum evaporation, holographic grating with preferable groove profile is successively fabricated.

Citation Download Citation

Wenhao Li, X. Bayanheshig, Chengshan Zhang, Jianxiang Gao, Hongzhu Yu, and Yuguo Tang "Application of photoresist melting method to the fabrication of holographic grating", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60242A (9 December 2005); https://doi.org/10.1117/12.666956

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available