Large format silicon immersion gratings for high resolution infrared spectroscopy

Jian Ge; Dan McDavitt; Bo Zhao; Shane Miller

doi:10.1117/12.670867

6 July 2006 Large format silicon immersion gratings for high resolution infrared spectroscopy

Jian Ge, Dan McDavitt, Bo Zhao, Shane Miller

Proceedings Volume 6273, Optomechanical Technologies for Astronomy; 62732C (2006) https://doi.org/10.1117/12.670867
Event: SPIE Astronomical Telescopes + Instrumentation, 2006, Orlando, Florida , United States

Abstract

We report progress on development of large format silicon immersion gratings (SIG) at UF. Currently SIGs on 4 inch diameter thick silicon disks can be routinely produced with groove periods from 7 microns to 250 microns and blaze angles from 20 degrees to 76 degrees. A new capability of making SIGs from 6 inch diameter silicon disks has also been demonstrated. A new Space Astronomy Instrumentation Lab (SAIL) facility is being established at UF to have a capability of fabricating SIGs on 8 inch diameter silicon disks with up to 4 inch thickness. Our prototype SIG with an 85x50 mm² etched grating area and a 54.7 deg blaze angle has produced a nearly diffraction-limited wavefront, less than 1% integrated scattered light and ghost intensity, a 74% peak blaze efficiency and a R = 55,000 resolving power at 1.55 μm.

Citation Download Citation

Jian Ge, Dan McDavitt, Bo Zhao, and Shane Miller "Large format silicon immersion gratings for high resolution infrared spectroscopy", Proc. SPIE 6273, Optomechanical Technologies for Astronomy, 62732C (6 July 2006); https://doi.org/10.1117/12.670867

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