Paper
15 May 2007 Fabrication and characterization of a passive silicon-based direct methanol fuel cell
J. P. Esquivel, N. Sabaté, J. Santander, N. Torres, C. Cané
Author Affiliations +
Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 658903 (2007) https://doi.org/10.1117/12.721907
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain
Abstract
Fabrication and characterization of a passive silicon microfabricated direct methanol fuel cell (&mgr;DMFC) are reported. The main characteristics of the device are its capability to work without complex pumping systems, only by capillary pressure, and the fact that its performance is not affected by the device orientation. A simple fabrication process, based in DRIE (Deep Reactive Ion Etching), allows obtaining a reliable and low-cost final device. The device consists of two silicon microfabricated plates mounted together with a commercial membrane electrode assembly (MEA). Current-voltage (I-V) and current-power (I-P) curves of the device at different methanol concentration, orientation and geometric variation of silicon plates are presented. Optimal performance was obtained with a methanol concentration of 3M, that yielded a maximum power density of 10.5 mW/cm2. The results obtained in this work demonstrate the feasibility of the device and give a guideline for design and conditions optimization.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. P. Esquivel, N. Sabaté, J. Santander, N. Torres, and C. Cané "Fabrication and characterization of a passive silicon-based direct methanol fuel cell", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 658903 (15 May 2007); https://doi.org/10.1117/12.721907
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KEYWORDS
Silicon

Microfabrication

Deep reactive ion etching

Electrodes

Semiconducting wafers

Capillaries

Electrons

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