On the prediction of electrostatic stresses in devices

G. Kloos

doi:10.1117/12.734072

25 October 2007 On the prediction of electrostatic stresses in devices

G. Kloos

Proceedings Volume 6675, Optical Modeling and Performance Predictions III; 66750F (2007) https://doi.org/10.1117/12.734072
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Electrostatic stresses represent a phenomenon that is frequently encountered when dielectric media are exposed to an electric field. Depending on the application, they might be considered a spurious effect or an effect that should be enhanced to improve performance. While measuring quadratic electrostriction with an optical interferometer they superimpose on the measurement signal that stems from electrostriction. Designing Maxwell-stress actuators they represent the effect that has to be maximized for best performance of the device. For the purpose of optimization, it is of importance to understand how the electrostatic stresses depend on the elastic and dielectric properties of the materials that are used in an actuator or in an optical instrument. These stresses are also functions of the orientation of the surface of the dielectric material with respect to the electric field and depend on the anisotropy of the material. Using a phenomenological description, it will be shown how they can be predicted for the purpose of improved instrument design. The method of analysis can be represented as an algorithm. It will be discussed what pitfalls should be avoided while deriving the results. The results can also be applied to materials that feature high anisotropy.

Citation Download Citation

G. Kloos "On the prediction of electrostatic stresses in devices", Proc. SPIE 6675, Optical Modeling and Performance Predictions III, 66750F (25 October 2007); https://doi.org/10.1117/12.734072

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