Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device

Sagnik Pal; Kemiao Jia; Sarah Maley; Huikai Xie

doi:10.1117/12.769590

20 February 2008 Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device

Sagnik Pal, Kemiao Jia, Sarah Maley, Huikai Xie

Proceedings Volume 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface; 68850B (2008) https://doi.org/10.1117/12.769590
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

A reduced order thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported. Thermal bimorphs with integrated Pt resistors are used for generating the angular rotation. Neglecting the temperature variation perpendicular to the length of the bimorphs, a 2D finite element thermal model with 4647 nodes is built. The accuracy of the model is verified by comparing the simulation results with thermal imaging data. Using a Krylov subspace based algorithm, a reduced order model is extracted from the finite element model. Results obtained from a reduced model with order ≥ 5 agree well with finite element results. Hence, a reduced order thermal model that saves computation time and resources without compromising the computation accuracy has been demonstrated.

Citation Download Citation

Sagnik Pal, Kemiao Jia, Sarah Maley, and Huikai Xie "Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device", Proc. SPIE 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 68850B (20 February 2008); https://doi.org/10.1117/12.769590

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