3D finite-element simulations of enhanced light transmission through arrays of holes in metal films

Sven Burger; Lin Zschiedrich; Jan Pomplun; Frank Schmidt; Benjamin Kettner; Daniel Lockau

doi:10.1117/12.827543

17 June 2009 3D finite-element simulations of enhanced light transmission through arrays of holes in metal films

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Benjamin Kettner, Daniel Lockau

Proceedings Volume 7390, Modeling Aspects in Optical Metrology II; 73900H (2009) https://doi.org/10.1117/12.827543
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

Light transmission through a 2D-periodic array of small rectangular apertures in a film of highly conductive material is simulated using a finite-element method. It is demonstrated that well converged results are obtained using higher-order finite-elements. The influence of the array periodicity and of corner roundings on transmission properties is investigated.

Citation Download Citation

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Benjamin Kettner, and Daniel Lockau "3D finite-element simulations of enhanced light transmission through arrays of holes in metal films", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900H (17 June 2009); https://doi.org/10.1117/12.827543

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