Chromatic confocal spectral interferometry for technical surface characterization

W. Lyda; D. Fleischle; T. Haist; W. Osten

doi:10.1117/12.826902

10 September 2009 Chromatic confocal spectral interferometry for technical surface characterization

W. Lyda, D. Fleischle, T. Haist, W. Osten

Proceedings Volume 7432, Optical Inspection and Metrology for Non-Optics Industries; 74320Z (2009) https://doi.org/10.1117/12.826902
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

Chromatic confocal spectral interferometry (CCSI) is a hybrid method for fast topography measurement, which combines the advantages of the interferometric gain and accuracy with the robustness of confocal microscopy. The CCSI-principle provides a single shot measurement of depth while offering a higher lateral resolution than commonly used spectral interferometers. This contribution is focused on the modeling and simulation of a CCSI-sensor for measuring rough surfaces, based on sequential and non-sequential ray-tracing. With the simulation, the influence of surface roughness, surface reflectivity, and surface contamination on reliability of the sensor can be estimated.

Citation Download Citation

W. Lyda, D. Fleischle, T. Haist, and W. Osten "Chromatic confocal spectral interferometry for technical surface characterization", Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 74320Z (10 September 2009); https://doi.org/10.1117/12.826902

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available