Polarization converted laser beams for micromachining applications

Ulrich Klug; Jan F. Düsing; Takashi Sato; Kunihiko Washio; Rainer Kling

doi:10.1117/12.842141

16 February 2010 Polarization converted laser beams for micromachining applications

Ulrich Klug, Jan F. Düsing, Takashi Sato, Kunihiko Washio, Rainer Kling

Proceedings Volume 7590, Micromachining and Microfabrication Process Technology XV; 759006 (2010) https://doi.org/10.1117/12.842141
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Radial and azimuthal polarizations have attracted new interest in the process development community due to improved beam propagation and absorption conditions in the ablation cavity. This paper presents our recent activities and results on polarization converted ultrashort laser pulses by use of segmented half-wave-plates for the generation of ripple structures with predetermined sub-patterns. The formation of ripples fabricated in metals, ceramics, and semiconductors is analyzed by the morphological investigation of the structures (spacing and orientation) as a function of the polarization state of the laser beam.

Citation Download Citation

Ulrich Klug, Jan F. Düsing, Takashi Sato, Kunihiko Washio, and Rainer Kling "Polarization converted laser beams for micromachining applications", Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 759006 (16 February 2010); https://doi.org/10.1117/12.842141

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