Comparison of two LTCC pressure sensors

Cosmin Tămaş; Cristina Marghescu; Ciprian Ionescu; Alexandru Vasile

doi:10.1117/12.883461

7 December 2010 Comparison of two LTCC pressure sensors

Cosmin Tămaş, Cristina Marghescu, Ciprian Ionescu, Alexandru Vasile

Proceedings Volume 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V; 78211V (2010) https://doi.org/10.1117/12.883461
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, 2010, Constanta, Romania

Abstract

LTCC (Low Temperature Co-Fired Ceramic) has great potential in the field of sensors and transducers due to its thermal, electrical and mechanical properties. The paper describes mainly work concerning a piezoresistive pressure sensor realized on LTCC with thick-film deposition technologies. The most important part of a piezoresistive pressure sensor is the membrane. A deflection appears when pressure is applied. Bonded to the membrane is a Wheatstone bridge - when the membrane is deformed a current imbalance follows [1]. The measurement system is realized as two independent functional blocks. The converting and interfacing block, situated close to the sensor is a specialized circuit, AD7730. This circuit contains an amplifier with variable casting, a delta-sigma converter, a digital programmable filter to eliminate errors and an internal calibration and I2C interface with the outer unit. The signal delivered by the sensor is processed and displayed by the microcontroller (in our case PIC16F73). The capacitance value is displayed on an LCD (liquid crystal display) with 2 lines and 16 columns. Another possibility is to connect the circuit to a PC for long term study and in order to allow complex operations and to build up graphs. We shall compare the circuit for this piezoresistive sensor with that for a capacitive pressure sensor realized on LTCC [2].

Citation Download Citation

Cosmin Tămaş, Cristina Marghescu, Ciprian Ionescu, and Alexandru Vasile "Comparison of two LTCC pressure sensors", Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78211V (7 December 2010); https://doi.org/10.1117/12.883461

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