Modeling and simulation of the surface profile forming process for optimum control of the lithographically fabricated microlenses and lens arrays

Zhengyu Miao; Wanjun Wang

doi:10.1117/12.912520

15 February 2012 Modeling and simulation of the surface profile forming process for optimum control of the lithographically fabricated microlenses and lens arrays

Zhengyu Miao, Wanjun Wang

Author Affiliations +

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520R (2012) https://doi.org/10.1117/12.912520
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Numerical tools have been widely used in the simulations of the exposure, the post-exposure bake, and the development processes in lithography of thick photoresist. Three-dimensional (3D) cellular automata (CA) model has also been successfully introduced for resist etching process simulation in recent years. In this paper, we report a 3D CA model to simulate the formation process of the surface profile of out-of-plane microlens fabricated using ultraviolet (UV) lithography of thick SU-8 resist. The simulation results were compared with experimental results. The comparison shows that the 3D CA model can be used to simulate the complicated surface formation process of the microlenses during the development process.

Citation Download Citation

Zhengyu Miao and Wanjun Wang "Modeling and simulation of the surface profile forming process for optimum control of the lithographically fabricated microlenses and lens arrays", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520R (15 February 2012); https://doi.org/10.1117/12.912520

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available