Mr. Zhengyu Miao Profile

Zhengyu Miao

at Louisiana State Univ

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Publications (2)

Proceedings Article | 16 February 2012 Paper

Modeling and simulation of the surface profile forming process for optimum control of the lithographically fabricated microlenses and lens arrays

Zhengyu Miao, Wanjun Wang

Proceedings Volume 8252, 82520R (2012) https://doi.org/10.1117/12.912520

KEYWORDS: 3D modeling, Etching, Microlens, Lithography, Microlens array, Process control, Photoresist processing, Scanning electron microscopy, Ultraviolet radiation, MATLAB

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Proceedings Article | 14 February 2011 Paper

Design and fabrication of a pre-aligned free-space optical interconnection device

Zhengyu Miao, Guocheng Shao, Wanjun Wang

Proceedings Volume 7930, 79300X (2011) https://doi.org/10.1117/12.878470

KEYWORDS: Ultraviolet radiation, Mirrors, Microlens array, Microlens, Micromirrors, Lithography, Polymers, Optical interconnects, Photomasks, Optical components

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