A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators

Sergio Camacho-León; Peter J. Gilgunn; Sergio O. Martínez-Chapa; Gary K. Fedder

doi:10.1117/12.908751

15 February 2012 A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators

Sergio Camacho-León, Peter J. Gilgunn, Sergio O. Martínez-Chapa, Gary K. Fedder

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520V (2012) https://doi.org/10.1117/12.908751
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

This work reports the experimental validation of a novel one-dimensional microscanner. The composite cantilever device implements thermoelastic resonant actuation using temperature gradients induced across two frequency-selective directions as a strategy to increase operating speed and decrease damping. The device was fabricated using 0.35-μm CMOS technology and aspect ratio dependent etch modulation. Resonance peaks were measured around 6.4 and 44.7 kHz at atmospheric-pressure conditions; the power sensitivities (2.8 and 1.6 °/W) of the device may compromise its performance for low-power, large-angle applications. Ultimately, the device is suitable for applications requiring a variation from low- to high-stability conditions with increasing operating speed.

Citation Download Citation

Sergio Camacho-León, Peter J. Gilgunn, Sergio O. Martínez-Chapa, and Gary K. Fedder "A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520V (15 February 2012); https://doi.org/10.1117/12.908751

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