Dr. Sergio Camacho-León Profile

Dr. Sergio Camacho-León

Research Professor at Tecnológico de Monterrey

SPIE Involvement:

Author

Area of Expertise:

MEMS , MOEMS , Optical Metrology , Microfabrication

Websites:

Personal Website

Publications (5)

Proceedings Article | 21 March 2016 Presentation + Paper

Maskless fabrication of a microfluidic device with interdigitated electrodes on PCB using laser ablation

Michael Contreras-Saenz, Christian Hassard, Rafael Vargas-Chacon, Jose Luis Gordillo, Sergio Camacho-Leon

Proceedings Volume 9705, 97050N (2016) https://doi.org/10.1117/12.2222961

KEYWORDS: Laser ablation, Microfluidics, Copper, Electrodes, Computer aided design, Fabrication, Microelectromechanical systems, Biosensing, Micromachining, Molecules

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Proceedings Article | 11 April 2013 Paper

Nondestructive characterization of residual stress within CMOS-based composite microcantilevers

Adrian Rendon-Hernandez, Sergio Camacho-Leon, Sergio Martinez-Chapa

Proceedings Volume 8694, 869405 (2013) https://doi.org/10.1117/12.2009903

KEYWORDS: Composites, Nondestructive evaluation, Microelectromechanical systems, Sensors, Biosensors, Finite element methods, Oxides, 3D modeling, Thin films, Reactive ion etching

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Proceedings Article | 14 March 2013 Paper

Electromagnetic modeling of surface plasmon resonance with Kretschmann configuration for biosensing applications in a CMOS-compatible interface

A. Salazar, S. Camacho-Leon, O. Rossetto, S. Martínez-Chapa

Proceedings Volume 8619, 86190V (2013) https://doi.org/10.1117/12.2004766

KEYWORDS: Reflectivity, Gold, Dielectrics, Titanium, Metals, Photodetectors, Interfaces, Refractive index, Prisms, Surface plasmons

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Proceedings Article | 16 February 2012 Paper

A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators

Sergio Camacho-León, Peter Gilgunn, Sergio Martínez-Chapa, Gary Fedder

Proceedings Volume 8252, 82520V (2012) https://doi.org/10.1117/12.908751

KEYWORDS: Oxides, Scanners, Metals, Actuators, Microopto electromechanical systems, Etching, Thermal effects, Resonators, Reactive ion etching, Temperature metrology

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Proceedings Article | 12 October 2005 Paper

Dynamic measurements of actuators driven by AlN layers

Jacek Kacperski, Malgorzata Kujawinska, Sergio Camacho Leon, Lukasz Nieradko, Michal Jozwik, Christophe Gorecki

Proceedings Volume 5958, 59580J (2005) https://doi.org/10.1117/12.622853

KEYWORDS: Liquid crystal on silicon, Interferometry, Finite element methods, Actuators, Aluminum nitride, Interferometers, Beam shaping, Phase shifts, Electrodes, Microelectromechanical systems

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