Analysis of beam interference reflected from atomic force microscope tip and periodic silicon surface under various humidity conditions

Hans P. Banerjee; Asanka T. Weerasinghe; Sergei F. Lyuksyutov

doi:10.1117/12.928451

15 October 2012 Analysis of beam interference reflected from atomic force microscope tip and periodic silicon surface under various humidity conditions

Hans P. Banerjee, Asanka T. Weerasinghe, Sergei F. Lyuksyutov

Author Affiliations +

Proceedings Volume 8497, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VI; 849715 (2012) https://doi.org/10.1117/12.928451
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Dynamical sensing based on combination of classical optical effects and atomic force microscopy (AFM) presents challenge for analysis of the forces at the nanoscale and beyond. An interference effect between light reflected from an AFM cantilever and highly reflective silicon surface of the calibration grating was studied for relative humidity (RH) varied between 9 and 60%. Force-distance analysis indicates on separation of capillary, van der Waals, adhesion, and electrostatic forces. The measurements performed in contact AFM mode suggest that the period of interference pattern observed in displacement curves is a function of humidity and varies between 293 nm at RH = 9% and 335 nm at RH > 50% with standard deviation less than 8 nm. Clear change of the interference period suggests that other than hardwarerelated factors may be involved in the formation of the interference in force-distance curves.

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Hans P. Banerjee, Asanka T. Weerasinghe, and Sergei F. Lyuksyutov "Analysis of beam interference reflected from atomic force microscope tip and periodic silicon surface under various humidity conditions", Proc. SPIE 8497, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VI, 849715 (15 October 2012); https://doi.org/10.1117/12.928451

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KEYWORDS

Atomic force microscopy

Humidity

Calibration

Silicon

Capillaries

Atomic force microscope

Beam analyzers

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