Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

Lasse Karvonen; Tapani Alasaarela; Henri Jussila; Soroush Mehravar; Ya Chen; Antti Säynätjoki; Robert A. Norwood; Nasser Peyghambarian; Khanh Kieu; Seppo Honkanen; Harri Lipsanen

doi:10.1117/12.2045006

7 March 2014 Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities

Lasse Karvonen, Tapani Alasaarela, Henri Jussila, Soroush Mehravar, Ya Chen, Antti Säynätjoki, Robert A. Norwood, Nasser Peyghambarian, Khanh Kieu, Seppo Honkanen, Harri Lipsanen

Author Affiliations +

Proceedings Volume 8982, Optical Components and Materials XI; 89820O (2014) https://doi.org/10.1117/12.2045006
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

We demonstrate a novel atomic layer deposition (ALD) process to make high quality nanocrystalline titanium dioxide (TiO₂) and zinc oxide (ZnO) with intermediate Al₂O₃ layers to limit the crystal size. The waveguide losses of TiO₂/Al₂O₃ nanolaminates measured using the prism coupling method for both 633 nm and 1551 nm wavelengths are as low as 0.2 ± 0.1 dB/mm with the smallest crystal size. We also show that the third-order optical nonlinearity in ZnO/Al₂O₃ nanolaminates can be enhanced by nanoscale engineering of the thin film structure.

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Lasse Karvonen, Tapani Alasaarela, Henri Jussila, Soroush Mehravar, Ya Chen, Antti Säynätjoki, Robert A. Norwood, Nasser Peyghambarian, Khanh Kieu, Seppo Honkanen, and Harri Lipsanen "Nanolaminate structures fabricated by ALD for reducing propagation losses and enhancing the third-order optical nonlinearities", Proc. SPIE 8982, Optical Components and Materials XI, 89820O (7 March 2014); https://doi.org/10.1117/12.2045006

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