Resist charging effect correction function qualification for photomasks production

Vadim Sidorkin; Michael Finken; Timo Wandel; Noriaki Nakayamada; G. R. Cantrell

doi:10.1117/12.2066126

8 October 2014 Resist charging effect correction function qualification for photomasks production

Vadim Sidorkin, Michael Finken, Timo Wandel, Noriaki Nakayamada, G. R. Cantrell

Proceedings Volume 9235, Photomask Technology 2014; 92350Z (2014) https://doi.org/10.1117/12.2066126
Event: SPIE Photomask Technology, 2014, Monterey, California, United States

Abstract

We quantitatively evaluate Nuflare’s latest resist charging effect correction (CEC) model for advanced photomask production using e-beam lithography. Functionality of this CEC model includes the simulation of static and timedependent charging effects together with an improved calibration method. CEC model calibration is performed by polynomial fitting of image placement distortions induced by various beam scattering effects on a special test design with writing density variations. CEC model parameters can be fine tuned for different photomask blank materials facilitating resist charging compensation maps for different product layers. Application of this CEC model into production yields a significant reduction in photomask image placement (IP), as well as improving photomask overlay between critical neighbouring layers. The correlations between IP improvement facilitated by this CEC model and single mask parameters are presented and discussed. The layer design specifics, resist and blank materials, coupled with their required exposure parameters are observed to be the major influences on CEC model performance.

Citation Download Citation

Vadim Sidorkin, Michael Finken, Timo Wandel, Noriaki Nakayamada, and G. R. Cantrell "Resist charging effect correction function qualification for photomasks production", Proc. SPIE 9235, Photomask Technology 2014, 92350Z (8 October 2014); https://doi.org/10.1117/12.2066126

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