Force monitoring transducers with more than 100,000 scale intervals

Vladimir Stavrov; Assen Shulev; Dimiter Chakarov; Galina Stavreva

doi:10.1117/12.2178719

21 May 2015 Force monitoring transducers with more than 100,000 scale intervals

Vladimir Stavrov, Assen Shulev, Dimiter Chakarov, Galina Stavreva

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95171Q (2015) https://doi.org/10.1117/12.2178719
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

This paper presents the results obtained at characterization of novel, high performing force transducers to be employed into monitoring systems with very high accuracy. Each force transducer comprises of a coherently designed mechanical transducer and a position microsensor with very high accuracy. The range of operation for the mechanical transducer has been optimized to fit the 500μm travel range of the position microsensor. Respectively, the flexures’ stiffness corresponds to achieve the maximum displacement at 70N load force. The position microsensor is a MEMS device, comprising of two rigid elements: an anchored and an actuated ones connected via one monolithic micro-flexure. Additionally, the micro-flexure comprises of two strain detecting cantilevers having four sidewall embedded piezoresistors connected in a Wheatstone bridge. The particular sensor provides a voltage signal having sensitivity in the range of 240μV/μm at 1V DC voltage supply. The experimental set-up for measurement of the load curve of the force transducer has demonstrated an overall force resolution of about 0.6mN. As a result, more than 100,000 scale intervals have been experimentally assessed. The present work forms development of a common approach for accurate measurement of various physical values, when they are transduced in a multi-D displacement. Due to the demonstrated high accuracy, the force transducers with piezoresistive MEMS sensors remove most of the constraints in force monitoring with ppm-accuracy.

Citation Download Citation

Vladimir Stavrov, Assen Shulev, Dimiter Chakarov, and Galina Stavreva "Force monitoring transducers with more than 100,000 scale intervals", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171Q (21 May 2015); https://doi.org/10.1117/12.2178719

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