Fast and precise dense grid size measurement method based on coaxial dual optical imaging system

Jiping Guo; Xiang Peng; Jiping Yu; Jian Hao; Yan Diao; Tao Song; Ameng Li; Xiaowei Lu

doi:10.1117/12.2196792

8 October 2015 Fast and precise dense grid size measurement method based on coaxial dual optical imaging system

Jiping Guo, Xiang Peng, Jiping Yu, Jian Hao, Yan Diao, Tao Song, Ameng Li, Xiaowei Lu

Proceedings Volume 9677, AOPC 2015: Optical Test, Measurement, and Equipment; 967705 (2015) https://doi.org/10.1117/12.2196792
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

Test sieves with dense grid structure are widely used in many fields, accurate gird size calibration is rather critical for success of grading analysis and test sieving. But traditional calibration methods suffer from the disadvantages of low measurement efficiency and shortage of sampling number of grids which could lead to quality judgment risk. Here, a fast and precise test sieve inspection method is presented. Firstly, a coaxial imaging system with low and high optical magnification probe is designed to capture the grid images of the test sieve. Then, a scaling ratio between low and high magnification probes can be obtained by the corresponding grids in captured images. With this, all grid dimensions in low magnification image can be obtained by measuring few corresponding grids in high magnification image with high accuracy. Finally, by scanning the stage of the tri-axis platform of the measuring apparatus, whole surface of the test sieve can be quickly inspected. Experiment results show that the proposed method can measure the test sieves with higher efficiency compare to traditional methods, which can measure 0.15 million grids (gird size 0.1mm) within only 60 seconds, and it can measure grid size range from 20μm to 5mm precisely. In a word, the presented method can calibrate the grid size of test sieve automatically with high efficiency and accuracy. By which, surface evaluation based on statistical method can be effectively implemented, and the quality judgment will be more reasonable.

Citation Download Citation

Jiping Guo, Xiang Peng, Jiping Yu, Jian Hao, Yan Diao, Tao Song, Ameng Li, and Xiaowei Lu "Fast and precise dense grid size measurement method based on coaxial dual optical imaging system", Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 967705 (8 October 2015); https://doi.org/10.1117/12.2196792

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