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We will provide our results on low resistive GaN-based tunnel junctions and optoelectronic devices grown by MOVPE. In order to obtain low resistive GaN-based tunnel junctions grown by MOVPE, we have pointed out that high impurity concentrations were required. We also found that large overlap with Mg/Si and small Mg segregation were key factors. The lowest contact resistivity value in our GaN tunnel junctions is now less than 1e-4 Ωcm2 over 8 kA/cm2. We have used such low GaN-based tunnel junctions in edge-emitting laser diodes and VCSELs, showing comparable laser characteristics to standard p-contact lasers.
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