Poster
1 October 2024 A novel finishing method of the precision optics using a gas cluster ion beam
Aram Hong, Myoung Choul Choi, Sangwon Hyun, Tianyi Wang, Mourad Idir, Daewook Kim
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Conference Poster
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Aram Hong, Myoung Choul Choi, Sangwon Hyun, Tianyi Wang, Mourad Idir, and Daewook Kim "A novel finishing method of the precision optics using a gas cluster ion beam", Proc. SPIE PC13134, Optical Manufacturing and Testing 2024, PC131340B (1 October 2024); https://doi.org/10.1117/12.3027378
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KEYWORDS
Ion beams

Precision optics

Optical surfaces

Ion beam finishing

Ions

Mass spectrometry

Physical coherence

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