Mr. Aayush Mitra Profile

Aayush Mitra

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Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

Optimizing focus and dose process windows for robust process control using a multi-feature analysis

Philip Groeger, Ranjan Khurana, Aayush Mitra, Mycahya Eggleston, Stefan Buhl, Wan-Soo Kim, Xaver Thrun

Proceedings Volume 11611, 116111E (2021) https://doi.org/10.1117/12.2583928

KEYWORDS: Process control, Finite element methods, Semiconducting wafers, Optical lithography, Semiconductors, Scanners, Logic, High volume manufacturing, Extreme ultraviolet lithography

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