Dr. Alexey V. Romashkin
at National Research Univ of Electronic Technology
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Publications (3)

Proceedings Article | 31 January 2022 Paper
Proceedings Volume 12157, 121570P (2022) https://doi.org/10.1117/12.2624365
KEYWORDS: Graphene, Etching, Oxides, Sensors, Ions, Electrodes, Ion beams, Resistance, Gas sensors, Silicon

Proceedings Article | 30 December 2016 Paper
A. Romashkin, A. Emelianov, K. Tsarik, I. Bobrinetskiy
Proceedings Volume 10224, 102241R (2016) https://doi.org/10.1117/12.2266747
KEYWORDS: Polymers, Ion beams, Etching, Oxides, Gallium, Phase shifts, Doping, Scanning electron microscopy, Atomic force microscopy, Oxygen

Proceedings Article | 30 December 2016 Paper
Alexey Romashkin, Denis Levin, Roman Yu. Rozanov, Vladimir Nevolin
Proceedings Volume 10224, 102241N (2016) https://doi.org/10.1117/12.2265336
KEYWORDS: Coating, Photoresist materials, Thin films, Etching, Aerosols, Liquids, Semiconducting wafers, Atomic force microscopy, Ultrasonics, Spectroscopy

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