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Anatoly Shchemelinin
Principal Systems Engineer at KLA Corp
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Publications (2)
Proceedings Article | 7 July 1997 Paper
Basic challenges of optical overlay measurements
Anatoly Shchemelinin, Eugene Shifrin, Alexander Zaslavsky
Proceedings Volume 3050, (1997) https://doi.org/10.1117/12.275929
KEYWORDS: Overlay metrology, Edge detection, Correlation function, Diffraction, Interference (communication), Signal detection, Imaging systems, Optical resolution, Optical testing, Precision measurement
Proceedings Article | 17 May 1994 Paper
Near-field nanofabrication with pipette-guided ArF excimer laser
Michael Rudman, Anatoly Shchemelinin, Klony Lieberman, Aaron Lewis
Proceedings Volume 2197, (1994) https://doi.org/10.1117/12.175473
KEYWORDS: Near field, Excimer lasers, Capacitance, Sensors, Prisms, Optical amplifiers, Modulation, Signal detection, Near field optics, Control systems
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