Mr. Andrew R. Dick Profile

Andrew R. Dick

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Publications (2)

SPIE Journal Paper | 26 July 2016

High aspect ratio patterning of photosensitive polyimide with low thermal expansion coefficient and low dielectric constant

Andrew Dick, William Bell, Brendan Luke, Erin Maines, Brennen Mueller, Brandon Rawlings, Paul Kohl, C. Grant Willson

JM3, Vol. 15, Issue 03, 033503, (July 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.033503

KEYWORDS: Dielectrics, Optical lithography, Polymers, Semiconducting wafers, Ultraviolet radiation, Silicon, Solids, Thin films, Sodium, Near ultraviolet

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Proceedings Article | 20 March 2015 Paper

Directly patternable dielectric based on fluorinated polyimide

Andrew Dick, William Bell, Brendan Luke, Erin Maines, Brennan Mueller, Paul Kohl, Brandon Rawlings, C. Grant Willson

Proceedings Volume 9425, 94251D (2015) https://doi.org/10.1117/12.2085793

KEYWORDS: Dielectrics, Optical lithography, Polymers, Silicon, Semiconducting wafers, Near ultraviolet, Absorbance, Silicon films, Packaging, Ultraviolet radiation

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